Nanofabrication: Principles, Capabilities and Limits

Nanofabrication: Principles, Capabilities, and Limits provides a practical guide to nanofabrication technologies and processes. It was first published in 2008 and is now in an updated third edition. The book introduces readers to the fundamentals and recent developments in nanofabrication techniques, with chapters covering optical lithography, electron beam lithography, and nanoimprinting lithography, as well as nanofabrication by focused ion beams, scanning tips, self-assembly, and nanoscale pattern transfer by etching and deposition. There is also a chapter describing various tricks that enable the fabrication of nanostructures that would otherwise be impossible using traditional methods. The unique feature of this book is that each technique introduced is not only about its capabilities but also its limits so that the readers are fully aware of the best options to choose from a toolbox of nanofabrication processes covered in the book.

Zheng Cui received his Ph.D. in China in 1988 and went to the UK in 1989 as a Visiting Fellow at the Microelectronics Research Center, Cambridge University. In 1993, he became a Senior Scientist and later a Principal Scientist at Central Microstructure Facility, Rutherford Appleton Laboratory, UK. In 2009, he returned to China to join the Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences, where he set up the Printable Electronics Research Center. In 2020, he retired from the Institute but has been carrying on as an advisor. He is now more involved in the industrial application of nanofabrication with key roles in a number of startup companies.